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Excimer LASER Gas Mixtures

Maximum precision, perfect mix, excellent stability. BUSE excimer gas mixtures are specifically tailored to your LASER system and manufactured with the utmost precision. They play a critical role in maximizing the performance of your excimer LASER system.

The Most Unique Fluorine Monitor in the World

The BUSE fluorine monitor is essential for verifying your gas mixtures. Each mixture’s fluorine content is precisely analyzed and certified for accuracy.

Exactly Mixed and Available

BUSE gas mixtures are available in various bottle sizes and reliably orderable quantities, compatible with all well-known excimer laser systems. You can rely on that!

Highest Accuracy

Our computer-controlled filling station and state-of-the-art analytical systems guarantee the accuracy of the fluorine gas mixtures. Individual formulations, depending on the type of excimer laser system - are possible.

Long-term Stability

Our gas mixtures are characterized by their long-term durability. The careful cylinder preparation minimizes chemical reactions with the inner wall, maintaining the highest standards.

Maximum Safety

BUSE gas mixtures are a reliable basis for the operational reliability of your excimer LASER system.

Individual Gas Requirements

The excimer LASER gas mixtures are adapted to your individual needs and are available in the quantities and sizes you require. We offer cylinder sizes with 10l, 20l and 50l water volume.

Reliable Delivery

Your requests are in good hands. Our order processing is competent and fast. The worldwide BUSE logistics network ensures delivery - just in time.

Personal Contact

Our team of experts is here to support you personally, offering tailored advice and on-site consultations to meet your specific needs.

The quality standard of BUSE

Exact Gas Mixtures for the Highest Excimer LASER Performance

Excimer LASER systems are utilized across a wide range of industries. In addition to the focus on medical technology, they are used in semiconductor production and material processing.

For every application, BUSE provides high-precision gas mixtures for the operation of excimer LASER systems – tailored to each respective system. The composition is controlled by extensive analytical procedures – a crucial part of the BUSE quality standard.

  • Ophthalmology
  • Dermatology
  • Photolithography
  • Material Processing
  • Analysis and Measurement Technology
  • Scientific Applications

BUSE guarantees the exact composition of the Excimer LASER gas mixture according to your individual wishes.

Tailored to your needs

Tested, Custom Gas Mixtures with Global Distribution

BUSE guarantees the highest quality and precision for individual gas mixtures. Gas cylinders are available for purchase or rent.

Your gas mixture is produced using comprehensive analytical methods, such as fourier transform infrared spectroscopy (FTIR) and gas chromatogram (GC). BUSE guarantees the composition’s accuracy, covering factors like the purity of individual gases, their proportions, and concentration within the final mixture.

The cylinders are precisely filled to the ppm range, with high stability of the gases to ensure the mixture’s quality. Fluorine concentration is carefully monitored using the BUSE fluorine monitor. The analysis results serve as the foundation for issuing the Certificate of Analysis (CoA) or Certificate of Conformity (CoC).

Request informations

  • ArF Argon Fluoride 193nm
  • XeCl Xenon Chloride 308nm
  • KrF Krypton Fluoride 248nm
  • Other gas mixtures on request

Our Promise

Guaranteed Delivery with the Hghest Safety Standards

    1. From Quotation to Order

    Professional, competent advice and needs assessment.

    2. Precise Production

    Fast turnaround on orders with precision manufacturing.

    3. Analysis, Monitoring, and Quality Assurance

    Full traceability throughout the manufacturing process.

    4. Just-in-time Delivery

    Controlled processes allow order status to be retrieved at any time.

    5. Worldwide Logistics

    Reliable logistics network for land, air, and sea transport.

    6. Easy Reordering

    Each order is documented individually and kept confidential

Approachable for you

Get in Touch with Us

We are happy to offer personalized advice, address your concerns, and answer your questions - whether by e-mail, telephone, or in a one-on-one meeting. We provide you with comprehensive support throughout the inquiry, ordering, and delivery process – and beyond.

We will reply to you within 48 hours!

Bettina Stürmer

Customer Service

Guaranteed expertise

The BUSE Group -
over 130 Years of Experience in Gas Mixtures

BUSE: A trusted name in gases for over 130 years and a highly experienced partner for your business. As one of the leading suppliers of technical gases, specialty gases, and firefighting gases, we bring extensive expertise to every partnership.

We place great emphasis on the high quality of our gases, accessories, and services. This commitment to excellence has been a key factor in our business growth over the years, and it will remain a cornerstone of our future success.

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